Eee 533: Semiconductor Device and Process Simulation Prerequisites




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EEE 533: Semiconductor Device and Process Simulation

Prerequisites:

  • Knowledge of semiconductor device theory.

  • Basic knowledge of linear algebra.

  • Basic knowledge of some programming language or MATLAB.

Course Description:

This course offers complete introduction to semiclassical modeling of semiconductor devices. This is very important to today’s student education in the solid-state area as nowadays computer-aided design has become an affordable and, in fact, necessary tool for designing contemporary semiconductor devices. With emphasis on a variety of semiclassical numerical methods, this course provides basic concepts and design tools for analyzing discrete one/two/three-dimensional devices such as Schottky diodes, MESFETs, MOSFETs, BJTs, and HBTs.



Course Topics:

  • Computational Electronics: Transistor era development. Why computational electronics?

  • Semiconductor Fundamentals: Semiconductor bandstructure, Simplified bandstructure models, Carrier dynamics, Semiconductor effective mass, Introduction to EPM, Derivation of EPM, Implementation of EPM, Semiclassical transport theory, Boltzmann transport equation, Scattering processes, Relaxation time approximation.

  • Numerical Analysis Review: Direct solution methods of partial differential equations, Iterative solution methods of partial differential equations.

  • Drift-Diffusion Model: Physical limitations, Bipolar semiconductor equations, Normalization and scaling, Gummel’s iteration method, Newton’s method, GR processes, Time-dependent simulations, Scharfetter-Gummel discretization, Examples of Application of DD model.

  • Mobility modeling: Mobility models used in commercial simulators.

  • Hydrodynamic model: Extended DD Model, Straton’s approach, Balance equation model, Displaced Maxwellian approximation, Characteristic rates calculation, Simplification to DD.

  • Commercial Simulators: Introduction to Silvaco ATLAS (device) and ATHENA (process) simulation framework. Simulator syntax, Numerical method choice, Types of solutions, Some language syntax.

  • Quantum Effects: Gate Leakage and quantum-mechanical space quantization, SCHRED simulation software

  • Process Simulation: Diffusion, ion implantation, etching, etc.


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